Integrated Microelectromechanical Gyroscopes

Technical Article

Fiber optic gyroscopes (FOGs), previously the low cost equivalent to other technologies such as ring laser gyroscopes (RLG), have some fresh competition. Microelectromechanical system (MEMS) gyroscopes are beginning to take market share away from traditional FOG applications. Specifically, antenna array stabilization, agricultural machine control, and general vehicle navigation are the battlegr...

Micromachined Gyroscopes: Challenges, Design Solutions, and Opportunities

Micromachined gyroscopes are probably the most challenging type of transducers ever attempted to be designed in micro-world. A nail-size dynamic system integrated with control electronics on the same silicon chip (Fig. 1(a)) is designed to be a very sensitive sensor which is potentially able to detect maneuvers and motions beyond human perception. Along with exciting opportunities which MEMS gy...

Gyroscope Technology and Applications: A Review in the Industrial Perspective

This paper is an overview of current gyroscopes and their roles based on their applications. The considered gyroscopes include mechanical gyroscopes and optical gyroscopes at macro- and micro-scale. Particularly, gyroscope technologies commercially available, such as Mechanical Gyroscopes, silicon MEMS Gyroscopes, Ring Laser Gyroscopes (RLGs) and Fiber-Optic Gyroscopes (FOGs), are discussed. Th...

A Novel Vacuum Packaging Design Process for Microelectromechanical System (MEMS) Quad-Mass Gyroscopes

System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation

Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and c...